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Displacement Sensing for Industry & Synchrotrons

Some of the most important tasks in industrial metrology applications are contactless measurements of distances and displacements , the detection of vibration amplitudes of machine components and tools , and the ultra-precise analysis of rotationally symmetric parts . Fields of application are extremely versatile and range from ultra-precision machining to semiconductor technology .
Requirements on accuracy , flexibility , and interconnectivity are constantly increasing and demand for ever more sophisticated solutions . These are supposed to combine highest precision , speed , and reliability - while providing remote access and software maintenance from virtually anywhere . attocube ’ s IDS3010 sensor has been specifically designed for challenging OEM and synchrotron applications and fulfills future requirements on precision already today .
Universal Applicability
PTB certified traceability down to 1,2 mm min . sensor head diameter
Compatibility & Traceability up to 10 MHz bandwidth down to 1,2 mm min . sensor head diameter down to 1,2 mm min . sensor head diameter
down to 5 x 10 -11 mbar UHV pressure
down to 1,2 mm min . sensor head diameter
up to 150 ° C bakeable
down to 4 % reflective various surfaces
multiple Multiple real-time interfaces interfaces
certified accuracy traceability
up to 10 MHz bandwidth
Precise & Fast
up to 10 MHz
bandwidth
various surfaces
various surfaces
various surfaces
up to 10 MHz bandwidth down to 1,2 mm min . sensor head diameter down to 1,2 mm min . sensor head diameter
Max . 2 m / s Max .
down to 1 nm resolution
up to 5 meters travel range
up up to up 2 m to / 10 s MHz
up to up 2 to m / s2 m / s
up to 2 m / s
target bandwith velocity bandwidth
various target surfaces target velocity velocity
various surfaces target velocity
various surfaces
up to 2 m / s target velocity
IDS Gehäuse
Ultra -Long
Ultra -Long
Max .
0
2 m / 5s
Max .
up to 2 m / s up to 2 m / s up to 2 m / s up to 2 m / s Multiple Interfaces up to 5 meters up to 5 meters up to 5 meters