CUSTOMER FEEDBACK CUSTOMER FEEDBACK
Prof. Dr. M. Tajmar Dipl.-Ing. Nanxi Kong
The noise and stability of the attocube FPS interferometer is up to two orders of
magnitude better than the second best system on the market. The installation
and use of the sensor was so easy that we could obtain high quality measurements
within two weeks after they first arrived at our lab – thanks to the great support
from attocube. The motion of a feed unit for micro manufacturing needs to be very precise
and accurate. As linear encoders allow only the measurement of the position
along one axis, the attocube FPS interferometer can be easily configured to
directly measure the position of the tool center point at the feed unit in all
directions.
(Institute for Aerospace Engineering, Dresden University of Technology, Germany) (Institute of Production Engineering, Helmut Schmidt University, Hamburg Germany)
Fields of Applications
Metrology
Microscopy
Sensor
number of sensor axes 1 or 3, upgradeable 1)
working distance 0...2000 mm
sensor resolution 1 pm
sensor repeatability 2 nm 2)
max. target velocity 1 m/s
measurement bandwidth 10 MHz
signal stability (WD: 20 mm) 0.286 nm (2σ)
Modes of Operation
remote operation
USB2.0, ethernet port optional
output signal: electronics USB, ethernet 3) , AquadB, HSSL
output signal: displacement measurement laser light
sensor alignment semi-automated via USB
sensor initialization fully automated, turnkey
Interfaces
digital interfaces
AquadB, HSSL (real-time)
Controller Hardware
Semiconductor
Research
Synchrotron
chassis 21.4 x 21.4 x 4.5 cm³
weight 1.9 kg
power supply 100/115/230 V, 50..60 Hz
power consumption max. 100 W
Measurement Laser
Machine & Tool
Vibration Analysis
Space Applications
laser source DFB laser (class 1)
laser power 150 μW
laser wavelength 1530 nm
wavelength stability 50 ppb
1) The FPS1010 can be software-upgraded from one to two and three axis, respectively.
2) At 10 mm working distance (WD), 5 nm repeatability at 100 mm WD, in vacuum conditions.
3) upgrade option /SYNC.
attoSENSORICS
Ultra Precision Sensors